Beam parameters:
Proton energy: 200 keV – 4 MeV, current: up to 200 eµA, brightness: 8-16 Amp(rad)-2m-2eV-1
Helium energy: 200 keV – 6 MeV, current: up to 40 eµA
Other ions: e.g. B, C, O, S, Si, Cu etc. energy: 200 keV to 20 MeV (depending on charge state), current: up to 10-50 eµA (depending on ion species)